From eenriquez at snf.stanford.edu Tue Sep 2 14:58:45 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Sep 2008 14:58:45 -0700 Subject: Comment epi2 SNF 2008-09-02 14:58:44: Update Message-ID: Purging the chamber. Will replace the pins tomorrow. From eenriquez at snf.stanford.edu Wed Sep 3 18:34:21 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Sep 2008 18:34:21 -0700 Subject: Shutdown epi2 SNF 2008-08-29 22:05:32: Pin tilt Message-ID: Found the susceptor quartz support had sagged which resulted in the breakage of all 3 lift pins. Replaced the susceptor support , lift pins and susceptor pins. From eenriquez at snf.stanford.edu Wed Sep 3 18:34:37 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Sep 2008 18:34:37 -0700 Subject: Comment epi2 SNF 2008-09-02 14:58:44: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 3 18:35:10 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Sep 2008 18:35:10 -0700 Subject: Comment epi2 SNF 2008-08-29 15:58:45: Dome clear/small chunks on susceptor Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 3 18:36:05 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Sep 2008 18:36:05 -0700 Subject: Comment epi2 SNF 2008-08-29 11:30:32: HCl cylinder change Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 3 18:41:27 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Sep 2008 18:41:27 -0700 Subject: Shutdown epi2 SNF 2008-09-03 18:41:27: Vacuum pump over temp Message-ID: The vacuum pump over temps and won't restart. Need to be sent out for service. Will give an update tomorrow on the estimated time to repair the pump. From eenriquez at snf.stanford.edu Wed Sep 3 18:41:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Sep 2008 18:41:43 -0700 Subject: Problem epi2 SNF 2008-08-29 15:26:59: weird deposition on wafers Message-ID: Archived From eenriquez at snf.stanford.edu Mon Sep 8 07:39:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Sep 2008 07:39:56 -0700 Subject: Comment epi2 SNF 2008-09-08 07:39:55: Update Message-ID: A new vacuum pump should be here today From eenriquez at snf.stanford.edu Mon Sep 8 14:35:20 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Sep 2008 14:35:20 -0700 Subject: Shutdown epi2 SNF 2008-09-03 18:41:27: Vacuum pump over temp Message-ID: Installed new vacuum pump. Now chamber is in hot idle. Maurice will check process and wafer handling. From eenriquez at snf.stanford.edu Mon Sep 8 14:35:31 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Sep 2008 14:35:31 -0700 Subject: Comment epi2 SNF 2008-09-08 07:39:55: Update Message-ID: Archived From maurice at snf.stanford.edu Mon Sep 8 16:06:45 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Sep 2008 16:06:45 -0700 Subject: Comment epi2 SNF 2008-09-08 16:06:44: testing after replacing pins/pump Message-ID: From maurice at snf.stanford.edu Mon Sep 8 17:41:46 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Sep 2008 17:41:46 -0700 Subject: Problem epi2 SNF 2008-09-08 17:41:46: Hazy wafers Message-ID: We have run 4 wafers and we are still seeing haze. We normally have to run 6 to 10 wafers before the haze goes away. From maurice at snf.stanford.edu Tue Sep 9 10:43:25 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 9 Sep 2008 10:43:25 -0700 Subject: Problem epi2 SNF 2008-09-09 10:43:25: Wafers not in center of susceptor Message-ID: needs adjustment From eenriquez at snf.stanford.edu Tue Sep 9 14:48:36 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 9 Sep 2008 14:48:36 -0700 Subject: Shutdown epi2 SNF 2008-09-09 14:48:35: Wafer not centered on susceptor Message-ID: Adjusted wafer placement on the susceptor but wafer position was still way off. Need to do further troubleshooting. From eenriquez at snf.stanford.edu Wed Sep 10 18:30:27 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Sep 2008 18:30:27 -0700 Subject: Comment epi2 SNF 2008-09-10 18:30:27: Update Message-ID: Wafer lift pins were binding to the guide holes on the susceptor support . Need to send the susceptor support to the quartz shop to increase the diameter of the guide holes. From eenriquez at snf.stanford.edu Fri Sep 12 15:15:21 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 Sep 2008 15:15:21 -0700 Subject: Comment epi2 SNF 2008-09-12 15:15:21: Update Message-ID: Installed the modified susceptor lift. Wafer fell off one of the pins when I was adjusting the wafer placement on the susceptor. Need to re-open the chamber to remove the wafer. From eenriquez at snf.stanford.edu Mon Sep 15 15:06:52 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Sep 2008 15:06:52 -0700 Subject: Comment epi2 SNF 2008-09-15 15:06:51: Update Message-ID: Wafer fell off the pins 2X during wafer position adjustments. Will try again tomorrow. From eenriquez at snf.stanford.edu Tue Sep 16 10:09:38 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Sep 2008 10:09:38 -0700 Subject: Shutdown epi2 SNF 2008-09-09 14:48:35: Wafer not centered on susceptor Message-ID: Adjusted wafer placement on the susceptor. Cycled several wafers with no problems. From eenriquez at snf.stanford.edu Tue Sep 16 10:09:49 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Sep 2008 10:09:49 -0700 Subject: Problem epi2 SNF 2008-09-09 10:43:25: Wafers not in center of susceptor Message-ID: Adjusted wafer placement on the susceptor. Cycled several wafers with no problems. From eenriquez at snf.stanford.edu Tue Sep 16 10:10:00 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Sep 2008 10:10:00 -0700 Subject: Comment epi2 SNF 2008-09-10 18:30:27: Update Message-ID: Archived From eenriquez at snf.stanford.edu Tue Sep 16 10:10:08 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Sep 2008 10:10:08 -0700 Subject: Comment epi2 SNF 2008-09-12 15:15:21: Update Message-ID: Archived From eenriquez at snf.stanford.edu Tue Sep 16 10:10:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Sep 2008 10:10:19 -0700 Subject: Comment epi2 SNF 2008-09-15 15:06:51: Update Message-ID: Archived From maurice at snf.stanford.edu Tue Sep 16 13:46:18 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 16 Sep 2008 13:46:18 -0700 Subject: Shutdown epi2 SNF 2008-09-16 13:46:17: testing Haze Message-ID: Ruuning wafers until haze clears up... usually takes about 10 runs From maurice at snf.stanford.edu Tue Sep 16 16:32:14 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 16 Sep 2008 16:32:14 -0700 Subject: Shutdown epi2 SNF 2008-09-16 13:46:17: testing Haze Message-ID: Ran SiGe750-2...AMAT qual run Wafers 9 and 10 are haze free. System up. From slcheng at snf.stanford.edu Wed Sep 17 18:41:15 2008 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Wed, 17 Sep 2008 18:41:15 -0700 Subject: Comment epi2 SNF 2008-09-17 18:41:15: Suggest to modify Big Etch Recipe Message-ID: When i was running the recipe earlier, the machine sometimes showed a pressure failure at the end of the process. This is probably becuase the pressure set point is raised from 5 torr to 40 torr between etching and purging steps. Therefore, i suggets to modify this recipe. Otherwise i need to end the recipe before it goes to purge step. From slcheng at snf.stanford.edu Thu Sep 18 11:47:44 2008 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Thu, 18 Sep 2008 11:47:44 -0700 Subject: Problem epi2 SNF 2008-09-18 11:47:43: Thickness Variation is over 10% Message-ID: I measured the Ge film on Si from Wollam. The Thickness vs differnet position is shown below: Positoin (cm) x-direction(um) y-direction(um) -3 1.0078 0.9296 -2 0.9945 0.9417 -1 0.9807 0.953 0 0.9666 0.9666 1 0.9546 0.9825 2 0.9443 0.9972 3 0.9345 1.0131 I only measure 6cm range from the center. It's already about 10% variation. Is it becasue the susceptor is not sitting flat enough and cause a temperature gradient? From ofidaner at snf.stanford.edu Thu Sep 18 13:53:17 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Thu, 18 Sep 2008 13:53:17 -0700 Subject: Problem epi2 SNF 2008-09-18 13:53:17: ge etch coat Message-ID: It happened a couple of times this week: At the end of this cleaning recipe the tool gives an overpressure error and puts the chamber in isolated state. From rshyam at snf.stanford.edu Mon Sep 22 02:05:30 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Mon, 22 Sep 2008 02:05:30 -0700 Subject: Shutdown epi2 SNF 2008-09-22 02:05:29: LLA stepper failed error during unloading Message-ID: My wafer is sitting inside LLA From eenriquez at snf.stanford.edu Mon Sep 22 08:33:18 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Sep 2008 08:33:18 -0700 Subject: Shutdown epi2 SNF 2008-09-22 02:05:29: LLA stepper failed error during unloading Message-ID: Homed LLA elevator and vented. Left user's wafer in the elevator. From maurice at snf.stanford.edu Mon Sep 22 15:39:18 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 22 Sep 2008 15:39:18 -0700 Subject: Problem epi2 SNF 2008-09-18 13:53:17: ge etch coat Message-ID: modified recipe so that it doesn't overpressure From maurice at snf.stanford.edu Mon Sep 22 15:42:29 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 22 Sep 2008 15:42:29 -0700 Subject: Comment epi2 SNF 2008-09-17 18:41:15: Suggest to modify Big Etch Recipe Message-ID: modified recipe so that it doesn't overpressure From eenriquez at snf.stanford.edu Thu Sep 25 08:20:32 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 25 Sep 2008 08:20:32 -0700 Subject: Shutdown epi2 SNF 2008-09-25 08:20:32: Burn box problem Message-ID: Exhaust burn box does not stay on. From eenriquez at snf.stanford.edu Thu Sep 25 11:40:15 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 25 Sep 2008 11:40:15 -0700 Subject: Shutdown epi2 SNF 2008-09-25 08:20:32: Burn box problem Message-ID: Power cycled the burn box. From edfei at snf.stanford.edu Mon Sep 29 15:20:44 2008 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Mon, 29 Sep 2008 15:20:44 -0700 Subject: Comment epi2 SNF 2008-09-29 15:20:43: LL pump Message-ID: LL pump off (hazardous). From eenriquez at snf.stanford.edu Mon Sep 29 15:28:07 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 29 Sep 2008 15:28:07 -0700 Subject: Shutdown epi2 SNF 2008-09-29 15:28:07: LL pump problem Message-ID: LL pump has seized and needs to be rebuilt. From eenriquez at snf.stanford.edu Tue Sep 30 14:57:40 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 30 Sep 2008 14:57:40 -0700 Subject: Comment epi2 SNF 2008-09-30 14:57:40: Update LL pump Message-ID: Pump has been ordered. Vendor will deliver the pump as soon as they receive a PO. It will take about 4 hours to install and check the pump.