Shutdown epi2 SNF 2008-08-29 22:05:32: Pin tilt

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 3 18:34:21 PDT 2008


Found the susceptor quartz support had sagged which resulted in the breakage of all 3 lift pins.  Replaced the susceptor support , lift pins and susceptor pins. 




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