Shutdown epi2 SNF 2008-09-03 18:41:27: Vacuum pump over temp

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Sep 8 14:35:20 PDT 2008


Installed new vacuum pump.  Now chamber is in hot idle.  Maurice will check process and wafer handling.




More information about the epi2-pcs mailing list