Problem epi2 SNF 2008-09-08 17:41:46: Hazy wafers

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Sep 8 17:41:46 PDT 2008


We have run 4 wafers and we are still seeing haze.  We normally have to run 6 to 10 wafers before the haze goes away.




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