Shutdown epi2 SNF 2008-09-09 14:48:35: Wafer not centered on susceptor

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Sep 9 14:48:36 PDT 2008


Adjusted wafer placement on the susceptor but wafer position was still way off.  Need to do further troubleshooting.




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