Comment epi2 SNF 2008-09-10 18:30:27: Update
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Sep 10 18:30:27 PDT 2008
Wafer lift pins were binding to the guide holes on the susceptor support . Need to send the susceptor support to the quartz shop to increase the diameter of the guide holes.
More information about the epi2-pcs
mailing list