Comment epi2 SNF 2008-09-10 18:30:27: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 10 18:30:27 PDT 2008


Wafer lift pins were binding to the guide holes on the susceptor support .  Need to send the susceptor support to the quartz shop to increase the diameter of the guide holes.




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