Comment epi2 SNF 2008-09-12 15:15:21: Update
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Sep 12 15:15:21 PDT 2008
Installed the modified susceptor lift. Wafer fell off one of the pins when I was adjusting the wafer placement on the susceptor. Need to re-open the chamber to remove the wafer.
More information about the epi2-pcs
mailing list