Comment epi2 SNF 2008-09-17 18:41:15: Suggest to modify Big Etch Recipe

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Wed Sep 17 18:41:15 PDT 2008


When i was running the recipe earlier, the machine sometimes showed a pressure failure at the end of the process. This is probably becuase the pressure set point is raised from 5 torr to 40 torr between etching and purging steps. Therefore, i suggets to modify this recipe. Otherwise i need to end the recipe before it goes to purge step.




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