Problem epi2 SNF 2008-09-18 13:53:17: ge etch coat

ofidaner at snf.stanford.edu ofidaner at snf.stanford.edu
Thu Sep 18 13:53:17 PDT 2008


It happened a couple of times this week: At the end of this cleaning recipe the tool gives an overpressure error and puts the chamber in isolated state. 




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