September 2008 Archives by date

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Starting: Tue Sep 2 14:58:45 PDT 2008
Ending: Tue Sep 30 14:57:40 PDT 2008
Messages: 36

• Comment epi2 SNF 2008-09-02 14:58:44: Update   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-08-29 22:05:32: Pin tilt   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-09-02 14:58:44: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-08-29 15:58:45: Dome clear/small chunks on susceptor   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-08-29 11:30:32: HCl cylinder change   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-09-03 18:41:27: Vacuum pump over temp   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2008-08-29 15:26:59: weird deposition on wafers   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-09-08 07:39:55: Update   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-09-03 18:41:27: Vacuum pump over temp   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-09-08 07:39:55: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-09-08 16:06:44: testing after replacing pins/pump   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-09-08 17:41:46: Hazy wafers   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-09-09 10:43:25: Wafers not in center of susceptor   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-09-09 14:48:35: Wafer not centered on susceptor   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-09-10 18:30:27: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-09-12 15:15:21: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-09-15 15:06:51: Update   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-09-09 14:48:35: Wafer not centered on susceptor   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2008-09-09 10:43:25: Wafers not in center of susceptor   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-09-10 18:30:27: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-09-12 15:15:21: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-09-15 15:06:51: Update   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-09-16 13:46:17: testing Haze   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-09-16 13:46:17: testing Haze   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-09-17 18:41:15: Suggest to modify Big Etch Recipe   slcheng at snf.stanford.edu
• Problem epi2 SNF 2008-09-18 11:47:43: Thickness Variation is over 10%   slcheng at snf.stanford.edu
• Problem epi2 SNF 2008-09-18 13:53:17: ge etch coat   ofidaner at snf.stanford.edu
• Shutdown epi2 SNF 2008-09-22 02:05:29: LLA stepper failed error during unloading   rshyam at snf.stanford.edu
• Shutdown epi2 SNF 2008-09-22 02:05:29: LLA stepper failed error during unloading   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2008-09-18 13:53:17: ge etch coat   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-09-17 18:41:15: Suggest to modify Big Etch Recipe   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2008-09-25 08:20:32: Burn box problem   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2008-09-25 08:20:32: Burn box problem   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-09-29 15:20:43: LL pump   edfei at snf.stanford.edu
• Shutdown epi2 SNF 2008-09-29 15:28:07: LL pump problem   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-09-30 14:57:40: Update LL pump   eenriquez at snf.stanford.edu

Last message date: Tue Sep 30 14:57:40 PDT 2008
Archived on: Sun Dec 23 08:52:50 PST 2012

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