From maurice at snf.stanford.edu Thu Apr 2 17:57:07 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Apr 2009 17:57:07 -0700 Subject: Comment epi2 SNF 2009-04-02 17:57:06: update 4/2/09 Message-ID: System is back together. Silicon wafers are haze free. There is still haze on the Ge wafers. I have set the machine up to run two more Ge deposition that should finish aound midnight. From maurice at snf.stanford.edu Thu Apr 2 17:58:55 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Apr 2009 17:58:55 -0700 Subject: Shutdown epi2 SNF 2009-03-09 09:46:41: Broken susceptor pins Message-ID: Lower dome replaced. New 4 point wafer support installed. New susceptor installed. Temp cal complete. From maurice at snf.stanford.edu Thu Apr 2 18:00:37 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Apr 2009 18:00:37 -0700 Subject: Problem epi2 SNF 2009-03-08 23:14:07: particles and pin mark on the back Message-ID: major clean completed From maurice at snf.stanford.edu Thu Apr 2 18:00:57 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Apr 2009 18:00:57 -0700 Subject: Problem epi2 SNF 2009-03-08 23:11:32: particles and pin mark on the back Message-ID: major clean completed From maurice at snf.stanford.edu Thu Apr 2 18:01:27 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Apr 2009 18:01:27 -0700 Subject: Problem epi2 SNF 2009-03-08 13:32:34: Upper Temperature higher Message-ID: major clean completed temp calibrated From maurice at snf.stanford.edu Thu Apr 2 18:01:47 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Apr 2009 18:01:47 -0700 Subject: Problem epi2 SNF 2009-03-02 18:03:14: cannot run in automatic Message-ID: running in auto ok From maurice at snf.stanford.edu Thu Apr 2 18:02:22 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Apr 2009 18:02:22 -0700 Subject: Problem epi2 SNF 2009-02-24 23:42:40: Many large particles... Message-ID: major clean completed please report status of particles From maurice at snf.stanford.edu Thu Apr 2 18:03:02 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Apr 2009 18:03:02 -0700 Subject: Problem epi2 SNF 2009-02-24 18:51:50: particles on edges of wafers Message-ID: cassettes rinsed in IPA and dryed From maurice at snf.stanford.edu Thu Apr 2 18:04:06 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Apr 2009 18:04:06 -0700 Subject: Problem epi2 SNF 2008-09-18 11:47:43: Thickness Variation is over 10% Message-ID: major clean completed please report thickness variations From maurice at snf.stanford.edu Fri Apr 3 09:35:18 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 3 Apr 2009 09:35:18 -0700 Subject: Shutdown epi2 SNF 2009-04-03 09:35:18: water flow Message-ID: can't start hot idle From eenriquez at snf.stanford.edu Fri Apr 3 10:31:12 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Apr 2009 10:31:12 -0700 Subject: Shutdown epi2 SNF 2009-04-03 09:35:18: water flow Message-ID: Reseated water quick disconnects. Now system is in Hot Idle From maurice at snf.stanford.edu Mon Apr 6 09:50:02 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 6 Apr 2009 09:50:02 -0700 Subject: Shutdown epi2 SNF 2009-04-03 13:20:21: Error occured Message-ID: Sean came in over the weekend and fixed the low dome pressure problem From maurice at snf.stanford.edu Mon Apr 6 10:33:46 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 6 Apr 2009 10:33:46 -0700 Subject: Shutdown epi2 SNF 2009-04-06 10:33:46: Insufficient data to calculate wafer center Message-ID: error 956 Insufficient data to calculate wafer center From eenriquez at snf.stanford.edu Mon Apr 6 14:59:22 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Apr 2009 14:59:22 -0700 Subject: Shutdown epi2 SNF 2009-04-06 10:33:46: Insufficient data to calculate wafer center Message-ID: Found two pieces of pH paper were blocking the center finder sensor. The two pieces were perfectly aligned with the sensor strip (9 sender/receiver pair). From gyama at snf.stanford.edu Mon Apr 6 17:31:03 2009 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 6 Apr 2009 17:31:03 -0700 Subject: Problem epi2 SNF 2009-04-06 17:31:03: DCS flow error 104% out Message-ID: this was during Ge etch coat Ge dep target 1um, got 0.14um, need to redo From grahamab at snf.stanford.edu Tue Apr 7 12:46:47 2009 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 7 Apr 2009 12:46:47 -0700 Subject: Problem epi2 SNF 2009-04-07 12:46:47: tool decided to run its own recipe Message-ID: ran chamber clean in manual mode (etchcoat ChA). put into automatic mode, had correct wafer recipe and clean recipe loaded (etchcoat ChA), no wafer-cassete associations or anything like that. hit "GO" and the process chamber started running the Ge etch/coat cleaning recipe. can't find anywhere in the software with that recipe loaded. running in manual mode without problems, but not sure why tool decided to run a different recipe. From maurice at snf.stanford.edu Mon Apr 13 11:12:08 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Apr 2009 11:12:08 -0700 Subject: Problem epi2 SNF 2009-04-06 17:31:03: DCS flow error 104% out Message-ID: DCS chiller back on From maurice at snf.stanford.edu Mon Apr 13 11:12:21 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Apr 2009 11:12:21 -0700 Subject: Comment epi2 SNF 2009-04-02 17:57:06: update 4/2/09 Message-ID: looged From maurice at snf.stanford.edu Mon Apr 13 11:14:25 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Apr 2009 11:14:25 -0700 Subject: Comment epi2 SNF 2009-04-13 11:14:25: inspected dome Message-ID: dome clear susceptor still looks new From maurice at snf.stanford.edu Mon Apr 13 11:14:38 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Apr 2009 11:14:38 -0700 Subject: Comment epi2 SNF 2009-03-31 14:25:28: update 3/31/09 Message-ID: logged From maurice at snf.stanford.edu Mon Apr 13 11:14:50 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Apr 2009 11:14:50 -0700 Subject: Comment epi2 SNF 2009-03-05 10:59:25: inspected dome Message-ID: logged From maurice at snf.stanford.edu Mon Apr 13 11:14:59 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Apr 2009 11:14:59 -0700 Subject: Comment epi2 SNF 2009-02-25 13:58:14: Cleaned cassette in LLA Message-ID: logged From maurice at snf.stanford.edu Fri Apr 17 17:56:17 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 17 Apr 2009 17:56:17 -0700 Subject: Problem epi2 SNF 2009-04-17 17:56:16: DCSflow not stable Message-ID: DCS chiller temp is 30.1...setpoint is 17 From narii at snf.stanford.edu Fri Apr 17 23:37:13 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Fri, 17 Apr 2009 23:37:13 -0700 Subject: Problem epi2 SNF 2009-04-17 23:37:12: CHA low water flow error Message-ID: While trying to set chamber to hot idle, ChA low water flow error occurs. Unable to get into hot idle. From masaharu at snf.stanford.edu Sat Apr 18 16:25:41 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sat, 18 Apr 2009 16:25:41 -0700 Subject: Problem epi2 SNF 2009-04-18 16:25:41: heater contactor off Message-ID: From mtang at snf.stanford.edu Thu Apr 23 09:08:22 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 23 Apr 2009 09:08:22 -0700 Subject: Problem epi2 SNF 2009-04-17 17:56:16: DCSflow not stable Message-ID: Chiller replaced. From masaharu at snf.stanford.edu Sun Apr 26 10:32:11 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sun, 26 Apr 2009 10:32:11 -0700 Subject: Problem epi2 SNF 2009-04-26 10:32:11: heater cotactor off again "in the weekend" Message-ID: tried several times to go to the hot idle, but couldn't. From jrjain at snf.stanford.edu Sun Apr 26 12:34:40 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sun, 26 Apr 2009 12:34:40 -0700 Subject: Problem epi2 SNF 2009-04-26 12:34:40: Repeat "Low Water Flow" Message-ID: I also tried to reset Ch A and change to Hot Idle quite a few times. The "Low Water Flow" error continues to occur. From jrjain at snf.stanford.edu Sun Apr 26 12:35:55 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sun, 26 Apr 2009 12:35:55 -0700 Subject: Shutdown epi2 SNF 2009-04-26 12:35:54: See previous problem reports.. Message-ID: ..regarding heater contacter and water flow. These problems seem to be occuring more frequently. From eenriquez at snf.stanford.edu Mon Apr 27 10:39:24 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Apr 2009 10:39:24 -0700 Subject: Shutdown epi2 SNF 2009-04-26 12:35:54: See previous problem reports.. Message-ID: Cleared the low water flow fault by disconnecting and reconnecting the cooling water line that goes to the lower lamp housing. Will cleanout the flow meter and water quick disconnects on Wed. From maurice at snf.stanford.edu Mon Apr 27 11:44:50 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 27 Apr 2009 11:44:50 -0700 Subject: Shutdown epi2 SNF 2009-04-27 11:44:49: wafer lost inside Message-ID: wafer lost system gives a chamber F slit open error...our chamber F doesn't have a slit. From eenriquez at snf.stanford.edu Mon Apr 27 14:03:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Apr 2009 14:03:33 -0700 Subject: Shutdown epi2 SNF 2009-04-27 11:44:49: wafer lost inside Message-ID: Wafer was in the LLA cassette. Cycled a wafer through the system with no problems. From gth at snf.stanford.edu Tue Apr 28 02:17:55 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Tue, 28 Apr 2009 02:17:55 -0700 Subject: Problem epi2 SNF 2009-04-28 02:17:55: sam error. Message-ID: this is some serious issue. same error as raja, masaharu. tried to go to hot idle and contacter error came off. From masaharu at snf.stanford.edu Thu Apr 30 21:12:01 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Thu, 30 Apr 2009 21:12:01 -0700 Subject: Problem epi2 SNF 2009-04-30 21:12:00: heater contactor off /low water flow again, again, and again Message-ID: Again, when I started up from cold idle to hot idle, I failed. Should we keep active idle, at the cost of lamp lifetime? Or shouldn't we? From masaharu at snf.stanford.edu Thu Apr 30 23:08:30 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Thu, 30 Apr 2009 23:08:30 -0700 Subject: Shutdown epi2 SNF 2009-04-30 23:08:29: heater contactor/low water flow Message-ID: