April 2009 Archives by subject

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Starting: Thu Apr 2 17:57:07 PDT 2009
Ending: Thu Apr 30 23:08:30 PDT 2009
Messages: 35

• Comment epi2 SNF 2009-02-25 13:58:14: Cleaned cassette in LLA   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-03-05 10:59:25: inspected dome   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-03-31 14:25:28: update 3/31/09   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-04-02 17:57:06: update 4/2/09   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-04-02 17:57:06: update 4/2/09   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-04-13 11:14:25: inspected dome   maurice at snf.stanford.edu
• Problem epi2 SNF 2008-09-18 11:47:43: Thickness Variation is over 10%   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-02-24 18:51:50: particles on edges of wafers   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-02-24 23:42:40: Many large particles...   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-03-02 18:03:14: cannot run in automatic   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-03-08 13:32:34: Upper Temperature higher   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-03-08 23:11:32: particles and pin mark on the back   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-03-08 23:14:07: particles and pin mark on the back   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-04-06 17:31:03: DCS flow error 104% out   gyama at snf.stanford.edu
• Problem epi2 SNF 2009-04-06 17:31:03: DCS flow error 104% out   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-04-07 12:46:47: tool decided to run its own recipe   grahamab at snf.stanford.edu
• Problem epi2 SNF 2009-04-17 17:56:16: DCSflow not stable   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-04-17 17:56:16: DCSflow not stable   mtang at snf.stanford.edu
• Problem epi2 SNF 2009-04-17 23:37:12: CHA low water flow error   narii at snf.stanford.edu
• Problem epi2 SNF 2009-04-18 16:25:41: heater contactor off   masaharu at snf.stanford.edu
• Problem epi2 SNF 2009-04-26 10:32:11: heater cotactor off again "in the weekend"   masaharu at snf.stanford.edu
• Problem epi2 SNF 2009-04-26 12:34:40: Repeat "Low Water Flow"   jrjain at snf.stanford.edu
• Problem epi2 SNF 2009-04-28 02:17:55: sam error.   gth at snf.stanford.edu
• Problem epi2 SNF 2009-04-30 21:12:00: heater contactor off /low water flow again, again, and again   masaharu at snf.stanford.edu
• Shutdown epi2 SNF 2009-03-09 09:46:41: Broken susceptor pins   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-04-03 09:35:18: water flow   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-04-03 09:35:18: water flow   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-04-03 13:20:21: Error occured   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-04-06 10:33:46: Insufficient data to calculate wafer center   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-04-06 10:33:46: Insufficient data to calculate wafer center   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-04-26 12:35:54: See previous problem reports..   jrjain at snf.stanford.edu
• Shutdown epi2 SNF 2009-04-26 12:35:54: See previous problem reports..   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-04-27 11:44:49: wafer lost inside   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-04-27 11:44:49: wafer lost inside   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-04-30 23:08:29: heater contactor/low water flow   masaharu at snf.stanford.edu

Last message date: Thu Apr 30 23:08:30 PDT 2009
Archived on: Sun Dec 23 08:52:52 PST 2012

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