From maurice at snf.stanford.edu Mon Aug 3 15:13:58 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 3 Aug 2009 15:13:58 -0700 Subject: Shutdown epi2 SNF 2009-08-03 15:13:58: water flow Message-ID: Reseated quick disconnects and tried to reset system ~10 times. Can't get system into hot idle. From maurice at snf.stanford.edu Tue Aug 4 10:52:31 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 4 Aug 2009 10:52:31 -0700 Subject: Shutdown epi2 SNF 2009-08-03 15:13:58: water flow Message-ID: Mike reset all quick disconnects again From maurice at snf.stanford.edu Tue Aug 4 11:03:18 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 4 Aug 2009 11:03:18 -0700 Subject: Problem epi2 SNF 2009-08-04 11:03:17: waterflow/system in active idle Message-ID: Because of the water flow issue at start up, I am asking users to keep the system in active idle until the water is fixed. It is also noted in coral. This should only before a few days. Please check coral for any new issues and for an update on the water. Thanks -m From alsune at snf.stanford.edu Sat Aug 8 00:46:52 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sat, 8 Aug 2009 00:46:52 -0700 Subject: Shutdown epi2 SNF 2009-08-08 00:46:51: Wafers got stuck in the process chamber Message-ID: Got error message "wafers are not in send position" Since the wafers are inside the process chamber, didn't want to play around with the epi commands. From maurice at snf.stanford.edu Mon Aug 10 15:34:23 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Aug 2009 15:34:23 -0700 Subject: Shutdown epi2 SNF 2009-08-08 00:46:51: Wafers got stuck in the process chamber Message-ID: recovered wafer exercised lift ran GE Etch From maurice at snf.stanford.edu Mon Aug 10 15:34:55 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Aug 2009 15:34:55 -0700 Subject: Problem epi2 SNF 2009-07-28 23:43:04: automatic mode problem Message-ID: seems to have gone away From maurice at snf.stanford.edu Mon Aug 10 15:35:11 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Aug 2009 15:35:11 -0700 Subject: Comment epi2 SNF 2009-07-17 16:35:42: LLB door Message-ID: ok now From maurice at snf.stanford.edu Mon Aug 10 15:35:34 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Aug 2009 15:35:34 -0700 Subject: Problem epi2 SNF 2009-07-13 16:41:41: forgot to put the wafer at cool plate Message-ID: ok. Bad operator! From maurice at snf.stanford.edu Mon Aug 10 15:35:47 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Aug 2009 15:35:47 -0700 Subject: Problem epi2 SNF 2009-07-10 08:02:39: low water flow problem Message-ID: logged From slcheng at snf.stanford.edu Wed Aug 12 23:13:13 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Wed, 12 Aug 2009 23:13:13 -0700 Subject: Shutdown epi2 SNF 2009-08-12 23:13:13: Rotation Stepper Fail Message-ID: it showed such a mesage when it finished my second run. I tried to home the roatation stepper but didn't work. From maurice at snf.stanford.edu Thu Aug 13 10:13:59 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 Aug 2009 10:13:59 -0700 Subject: Shutdown epi2 SNF 2009-08-12 23:13:13: Rotation Stepper Fail Message-ID: Reset chamber Homed rotation and transfer robots From slcheng at snf.stanford.edu Sat Aug 15 17:51:41 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Sat, 15 Aug 2009 17:51:41 -0700 Subject: Shutdown epi2 SNF 2009-08-15 17:51:41: Bulb failed in upper outer zone Message-ID: From eenriquez at snf.stanford.edu Mon Aug 17 11:15:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Aug 2009 11:15:52 -0700 Subject: Shutdown epi2 SNF 2009-08-15 17:51:41: Bulb failed in upper outer zone Message-ID: Replaced 4 heater bulbs. Ran an etch with no problems. From maurice at snf.stanford.edu Mon Aug 17 11:46:51 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Aug 2009 11:46:51 -0700 Subject: Problem epi2 SNF 2009-08-04 11:03:17: waterflow/system in active idle Message-ID: Water flow problem has gone away. From maurice at snf.stanford.edu Mon Aug 17 11:47:03 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Aug 2009 11:47:03 -0700 Subject: Problem epi2 SNF 2009-07-29 15:01:32: water sensor problem Message-ID: Water flow problem has gone away. From slcheng at snf.stanford.edu Tue Aug 18 14:51:43 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Tue, 18 Aug 2009 14:51:43 -0700 Subject: Problem epi2 SNF 2009-08-18 14:51:42: rotation stepper failed homing Message-ID: it showed such an error three times today. It happend when i tried to tranfer the wafers in or out.. Even the transfer success, it takes longer time than before. Reset the chamber can sometimes home the stepper but not every time. From cursive at snf.stanford.edu Tue Aug 18 16:21:20 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 18 Aug 2009 16:21:20 -0700 Subject: Problem epi2 SNF 2009-08-18 16:21:20: stepper homing problem Message-ID: homing problem again. Reset it several times! From yoonjin at snf.stanford.edu Wed Aug 19 00:29:59 2009 From: yoonjin at snf.stanford.edu (yoonjin at snf.stanford.edu) Date: Wed, 19 Aug 2009 00:29:59 -0700 Subject: Problem epi2 SNF 2009-08-19 00:29:59: homing problem again Message-ID: From eenriquez at snf.stanford.edu Wed Aug 19 09:40:51 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Aug 2009 09:40:51 -0700 Subject: Comment epi2 SNF 2009-08-19 09:40:51: Update homing problem Message-ID: Adjusted the susceptor rotation homing speed from 8 rpm to 9 rpm. From rshyam at snf.stanford.edu Thu Aug 20 06:19:47 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Thu, 20 Aug 2009 06:19:47 -0700 Subject: Problem epi2 SNF 2009-08-20 06:19:46: Could not run in auto mode Message-ID: Gave error in auto mode. Ran in manual mode. From rshyam at snf.stanford.edu Thu Aug 20 06:20:09 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Thu, 20 Aug 2009 06:20:09 -0700 Subject: Problem epi2 SNF 2009-08-20 06:20:09: GeH4 empty? Message-ID: Gave GeH4 flow deviated by 100% error. Is GeH4 empty? From eenriquez at snf.stanford.edu Thu Aug 20 09:17:26 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 20 Aug 2009 09:17:26 -0700 Subject: Problem epi2 SNF 2009-08-20 06:20:09: GeH4 empty? Message-ID: Installed new GeH4 cylinder. From maurice at snf.stanford.edu Thu Aug 20 11:02:44 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Aug 2009 11:02:44 -0700 Subject: Shutdown epi2 SNF 2009-08-20 11:02:43: lift error Message-ID: From maurice at snf.stanford.edu Thu Aug 20 15:14:07 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Aug 2009 15:14:07 -0700 Subject: Shutdown epi2 SNF 2009-08-20 11:02:43: lift error Message-ID: EE adjusted air pressures on the susceptor lift ... Tested several times without problem.... Will continue to monitor lift speed... May need more fine adjustment. From maurice at snf.stanford.edu Thu Aug 20 15:14:36 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Aug 2009 15:14:36 -0700 Subject: Problem epi2 SNF 2009-08-18 16:21:20: stepper homing problem Message-ID: EE adjusted speed From maurice at snf.stanford.edu Thu Aug 20 15:14:47 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Aug 2009 15:14:47 -0700 Subject: Problem epi2 SNF 2009-08-18 14:51:42: rotation stepper failed homing Message-ID: EE adjusted speed From maurice at snf.stanford.edu Thu Aug 20 15:15:09 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 20 Aug 2009 15:15:09 -0700 Subject: Problem epi2 SNF 2009-08-19 00:29:59: homing problem again Message-ID: EE adusted speed From grahamab at snf.stanford.edu Thu Aug 20 20:18:58 2009 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 20 Aug 2009 20:18:58 -0700 Subject: Comment epi2 SNF 2009-08-20 20:18:57: alarmed, but ran Message-ID: after bringing chamber up to active idle, tried to run chamber etch/coat. got a "lift can't home" alarm and went into cold idle. reset and tried again, but alarmed when it went back into cold idle. reset and it finally made it back to active idle and ran fine. ran one wafer twice without issue, but tool alarmed again after finishing final chamber etch. this time alarm was rotation error. cleared and put back to inert idle. From rshyam at snf.stanford.edu Fri Aug 21 06:07:13 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Fri, 21 Aug 2009 06:07:13 -0700 Subject: Problem epi2 SNF 2009-08-21 06:07:12: error Message-ID: repeatedly gave "chamber A lift cannot reach process position" From alsune at snf.stanford.edu Sun Aug 23 20:28:46 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Aug 2009 20:28:46 -0700 Subject: Shutdown epi2 SNF 2009-08-23 20:28:45: Wafer stuck in the process chamber Message-ID: Got a error message saying that the rotation stepper has failed. Had to shut down because it also display message about 'fatal fault of wafer in load lock B'. Would it possible to unload the wafers in the cassette on the shelf if it can be recovered? Thanks. From eenriquez at snf.stanford.edu Fri Aug 28 14:42:57 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Aug 2009 14:42:57 -0700 Subject: Comment epi2 SNF 2009-08-28 14:42:57: Update Message-ID: Field service will be in this weekend. From maurice at snf.stanford.edu Mon Aug 31 11:54:53 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 31 Aug 2009 11:54:53 -0700 Subject: Comment epi2 SNF 2009-08-31 11:54:52: process lift error again Message-ID: Brought system to hot idle. Successfully loaded and unloaded 8 wafers from B load lock to process chamber to cool station and back to load lock B. Started etch program and system gave process lift error. From eenriquez at snf.stanford.edu Mon Aug 31 14:51:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 31 Aug 2009 14:51:34 -0700 Subject: Comment epi2 SNF 2009-08-31 14:51:33: Update Message-ID: Field service will return tomorrow morning.