August 2009 Archives by author

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Starting: Mon Aug 3 15:13:58 PDT 2009
Ending: Mon Aug 31 14:51:34 PDT 2009
Messages: 33

• Shutdown epi2 SNF 2009-08-08 00:46:51: Wafers got stuck in the process chamber   alsune at snf.stanford.edu
• Shutdown epi2 SNF 2009-08-23 20:28:45: Wafer stuck in the process chamber   alsune at snf.stanford.edu
• Problem epi2 SNF 2009-08-18 16:21:20: stepper homing problem   cursive at snf.stanford.edu
• Shutdown epi2 SNF 2009-08-15 17:51:41: Bulb failed in upper outer zone   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-08-19 09:40:51: Update homing problem   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2009-08-20 06:20:09: GeH4 empty?   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-08-28 14:42:57: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-08-31 14:51:33: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-08-20 20:18:57: alarmed, but ran   grahamab at snf.stanford.edu
• Shutdown epi2 SNF 2009-08-03 15:13:58: water flow   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-08-03 15:13:58: water flow   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-08-04 11:03:17: waterflow/system in active idle   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-08-08 00:46:51: Wafers got stuck in the process chamber   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-07-28 23:43:04: automatic mode problem   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-07-17 16:35:42: LLB door   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-07-13 16:41:41: forgot to put the wafer at cool plate   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-07-10 08:02:39: low water flow problem   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-08-12 23:13:13: Rotation Stepper Fail   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-08-04 11:03:17: waterflow/system in active idle   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-07-29 15:01:32: water sensor problem   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-08-20 11:02:43: lift error   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-08-20 11:02:43: lift error   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-08-18 16:21:20: stepper homing problem   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-08-18 14:51:42: rotation stepper failed homing   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-08-19 00:29:59: homing problem again   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-08-31 11:54:52: process lift error again   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-08-20 06:19:46: Could not run in auto mode   rshyam at snf.stanford.edu
• Problem epi2 SNF 2009-08-20 06:20:09: GeH4 empty?   rshyam at snf.stanford.edu
• Problem epi2 SNF 2009-08-21 06:07:12: error   rshyam at snf.stanford.edu
• Shutdown epi2 SNF 2009-08-12 23:13:13: Rotation Stepper Fail   slcheng at snf.stanford.edu
• Shutdown epi2 SNF 2009-08-15 17:51:41: Bulb failed in upper outer zone   slcheng at snf.stanford.edu
• Problem epi2 SNF 2009-08-18 14:51:42: rotation stepper failed homing   slcheng at snf.stanford.edu
• Problem epi2 SNF 2009-08-19 00:29:59: homing problem again   yoonjin at snf.stanford.edu

Last message date: Mon Aug 31 14:51:34 PDT 2009
Archived on: Sun Dec 23 08:52:53 PST 2012

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