From eenriquez at snf.stanford.edu  Tue Dec  1 13:32:38 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 1 Dec 2009 13:32:38 -0800
Subject: Shutdown epi2 SNF 2009-11-30 15:39:14: no wafer on blade
Message-ID: <mailman.1263.1356281551.3688.epi2-pcs@snf.stanford.edu>

Adjusted the wafer sensor gain.



From eenriquez at snf.stanford.edu  Tue Dec  1 13:33:55 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 1 Dec 2009 13:33:55 -0800
Subject: Comment epi2 SNF 2009-11-24 11:38:32: Update upper inner bulbs
Message-ID: <mailman.1264.1356281551.3688.epi2-pcs@snf.stanford.edu>

Replaced all of the upper chamber lamps.



From eenriquez at snf.stanford.edu  Tue Dec  1 13:34:59 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 1 Dec 2009 13:34:59 -0800
Subject: Problem epi2 SNF 2009-11-23 17:44:57: Upper Inner Bulbs
Message-ID: <mailman.1265.1356281551.3688.epi2-pcs@snf.stanford.edu>

Replaced all upper chamber heat lamps.



From maurice at snf.stanford.edu  Thu Dec  3 17:08:47 2009
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 3 Dec 2009 17:08:47 -0800
Subject: Shutdown epi2 SNF 2009-12-03 17:08:46: 
Message-ID: <mailman.1266.1356281551.3688.epi2-pcs@snf.stanford.edu>

Ran AAA_20KW_ TEST
Read upper and lower temps at 230 sec into step 2
4/22/09 upper=885   lower=885
 (Right after AMAT did temp qual on clean system)
-
7/09/09 upper=879   lower=885  
(AAA_mega etch done before  test. 
Users may want to increase there deposition temperatures slightly if their recipes are temerature sensitive)



From maurice at snf.stanford.edu  Thu Dec  3 17:09:06 2009
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 3 Dec 2009 17:09:06 -0800
Subject: Shutdown epi2 SNF 2009-12-03 17:08:46: 
Message-ID: <mailman.1267.1356281551.3688.epi2-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Thu Dec  3 17:16:23 2009
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 3 Dec 2009 17:16:23 -0800
Subject: Comment epi2 SNF 2009-12-03 17:16:23: Ran AAA_20KW_ TEST
Message-ID: <mailman.1268.1356281551.3688.epi2-pcs@snf.stanford.edu>

Ran AAA_20KW_ TEST after changing all upper lamps.
Read upper and lower temps at 230 sec into step 2
-
-
12/1/09  upper=8885  lower=893
-
11/23/09 upper=875   lower=880 
-
7/09/09 upper=879   lower=885  
-
4/22/09 upper=885   lower=885
 (Right after AMAT did temp qual on clean system)



From gth at snf.stanford.edu  Fri Dec 11 04:08:53 2009
From: gth at snf.stanford.edu (gth at snf.stanford.edu)
Date: Fri, 11 Dec 2009 04:08:53 -0800
Subject: Shutdown epi2 SNF 2009-12-11 04:08:52: wafer off centered. 
Message-ID: <mailman.1269.1356281551.3688.epi2-pcs@snf.stanford.edu>

please recover wafers and put in diff box.



From eenriquez at snf.stanford.edu  Fri Dec 11 08:50:23 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 11 Dec 2009 08:50:23 -0800
Subject: Shutdown epi2 SNF 2009-12-11 04:08:52: wafer off centered. 
Message-ID: <mailman.1270.1356281552.3688.epi2-pcs@snf.stanford.edu>

Opened the transfer chamber , recovered the user's wafer and placed it in his wafer box.