From maurice at snf.stanford.edu Mon Feb 2 11:25:11 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 2 Feb 2009 11:25:11 -0800 Subject: Shutdown epi2 SNF 2009-01-31 21:06:35: wafer slide detected Message-ID: EE recovered wafer and ran a Big Etch. - We cycled 5 wafers from LLB to processes chamber and inspected flat location when wafers unloaded. Flats were aligned and wafers where completely in the cassette. - We moved the five wafers to different slots in the boat and repeated loading of the wafers in and out of the process chamber from LLB. Flats were aligned and wafers where completely in the cassette. - We were unable to reproduce user complaints of wafers not aligned or not completely in the cassette after processing. - We will investigate more if we get more complaints. From maurice at snf.stanford.edu Mon Feb 2 11:31:06 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 2 Feb 2009 11:31:06 -0800 Subject: Problem epi2 SNF 2009-01-31 20:53:31: wafer slide detected Message-ID: wafer recovered From maurice at snf.stanford.edu Mon Feb 2 11:32:11 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 2 Feb 2009 11:32:11 -0800 Subject: Comment epi2 SNF 2009-01-24 18:47:25: mechanical arm problem Message-ID: couldn't reproduce problem. If it is seen again, please write it up on coral again. From maurice at snf.stanford.edu Mon Feb 2 11:33:11 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 2 Feb 2009 11:33:11 -0800 Subject: Problem epi2 SNF 2009-01-22 19:16:54: Possible wafer handling problem Message-ID: See coral report for 2/2/09... couldn't reproce hadling problem From maurice at snf.stanford.edu Mon Feb 2 11:33:30 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 2 Feb 2009 11:33:30 -0800 Subject: Comment epi2 SNF 2009-01-29 10:10:47: Dome inspected/clear Message-ID: archive From rshyam at snf.stanford.edu Wed Feb 4 09:21:04 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Wed, 4 Feb 2009 09:21:04 -0800 Subject: Problem epi2 SNF 2009-02-04 09:21:03: Chamber A Main Scrubber fault Message-ID: Scrubber fault happened. Elmer and Mike took care of it. From slcheng at snf.stanford.edu Wed Feb 4 18:15:17 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Wed, 4 Feb 2009 18:15:17 -0800 Subject: Shutdown epi2 SNF 2009-02-04 18:15:16: Heater Contactor off+ water flow low Message-ID: The machine showed the above messge when i tried to bring it to hot idle. I tried it twice and it showed the same message. i found the same problem happened this afternoon also. In the process page, the power of the upper and lower lamps are both 0 at the beginning of the Hot idle mode. From eenriquez at snf.stanford.edu Wed Feb 4 18:30:15 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Feb 2009 18:30:15 -0800 Subject: Problem epi2 SNF 2009-02-04 09:21:03: Chamber A Main Scrubber fault Message-ID: Cleaned the burn box's combustion chamber. From eenriquez at snf.stanford.edu Wed Feb 4 19:06:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Feb 2009 19:06:30 -0800 Subject: Shutdown epi2 SNF 2009-02-04 18:15:16: Heater Contactor off+ water flow low Message-ID: Re-seated all the cooling water line quick disconnect fittings. Switched chamber status from Cold Idle to Hot Idle many times without any problems. If problem re-occurs, DO NOT SHUTDOWN the tool immediately. Try several times to reset the fault and then Go to HOT IDLE From skoh at snf.stanford.edu Wed Feb 11 16:40:53 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Wed, 11 Feb 2009 16:40:53 -0800 Subject: Shutdown epi2 SNF 2009-02-11 16:40:52: Susceptor tilted Message-ID: Maurice checked the chamber when I noticed that the upper temperatures of the wafer during the recipe was inconsistent and higher than before. We found that the susceptor was tilted, probably explaining the temperature issues. From maurice at snf.stanford.edu Thu Feb 12 15:03:17 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Feb 2009 15:03:17 -0800 Subject: Shutdown epi2 SNF 2009-02-11 16:40:52: Susceptor tilted Message-ID: replaced susceptor support pin From maurice at snf.stanford.edu Thu Feb 12 15:04:15 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Feb 2009 15:04:15 -0800 Subject: Shutdown epi2 SNF 2009-02-12 15:04:14: Testing for haze Message-ID: Testing for haze after susceptor support pin replaced. From maurice at snf.stanford.edu Thu Feb 12 17:13:00 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Feb 2009 17:13:00 -0800 Subject: Shutdown epi2 SNF 2009-02-12 15:04:14: Testing for haze Message-ID: Silicon deposition is haze free. Need test for Ge From maurice at snf.stanford.edu Thu Feb 12 17:13:26 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Feb 2009 17:13:26 -0800 Subject: Problem epi2 SNF 2009-02-12 17:13:26: Need test for Ge Message-ID: Silicon deposition is haze free. Need test for Ge. From rshyam at snf.stanford.edu Fri Feb 13 00:24:12 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Fri, 13 Feb 2009 00:24:12 -0800 Subject: Comment epi2 SNF 2009-02-13 00:24:12: Ge tests Message-ID: User slcheng found spots and lines on Ge tests. I am running more tests. From maurice at snf.stanford.edu Tue Feb 17 16:47:50 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Feb 2009 16:47:50 -0800 Subject: Shutdown epi2 SNF 2009-02-17 16:47:48: wafer out of pocket Message-ID: From maurice at snf.stanford.edu Wed Feb 18 10:37:22 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Feb 2009 10:37:22 -0800 Subject: Comment epi2 SNF 2009-02-18 10:37:21: update Message-ID: Susceptor is moving too fast from home to process position...wafer is not brought into susceptor pocket gently. Inspecting susceptor lift acuator. From maurice at snf.stanford.edu Wed Feb 18 17:03:25 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Feb 2009 17:03:25 -0800 Subject: Shutdown epi2 SNF 2009-02-17 16:47:48: wafer out of pocket Message-ID: Susceptor is moving too fast from home to process position...wafer is not brought into susceptor pocket gently. Inspecting susceptor lift acuator. From maurice at snf.stanford.edu Wed Feb 18 17:06:04 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Feb 2009 17:06:04 -0800 Subject: Comment epi2 SNF 2009-02-18 10:37:21: update Message-ID: EE adjusted air pressure to the susceptor lift cylinders to adjust the lift/drop speed for the home/process/exchange positions. - Tested wafer drop...it is in the middle of the pocket From maurice at snf.stanford.edu Wed Feb 18 17:06:31 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Feb 2009 17:06:31 -0800 Subject: Comment epi2 SNF 2009-02-13 00:24:12: Ge tests Message-ID: wafer not in pockiet From maurice at snf.stanford.edu Wed Feb 18 17:07:58 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Feb 2009 17:07:58 -0800 Subject: Comment epi2 SNF 2009-02-18 17:07:58: Ge testing Message-ID: Testing after lift speed adjusted (wafers now in susceptor pocket). From grahamab at snf.stanford.edu Fri Feb 20 07:41:24 2009 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 20 Feb 2009 07:41:24 -0800 Subject: Comment epi2 SNF 2009-02-20 07:41:24: system left in active idle again Message-ID: system once again found left in active idle all night without use. wafers still in system. From rshyam at snf.stanford.edu Sat Feb 21 14:33:55 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sat, 21 Feb 2009 14:33:55 -0800 Subject: Problem epi2 SNF 2009-02-21 14:33:55: DCS jumping wildly Message-ID: From grahamab at snf.stanford.edu Sat Feb 21 22:44:56 2009 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sat, 21 Feb 2009 22:44:56 -0800 Subject: Problem epi2 SNF 2009-02-21 22:44:55: DCS still sporadic Message-ID: From mdickey at snf.stanford.edu Mon Feb 23 06:27:27 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 23 Feb 2009 06:27:27 -0800 Subject: Comment epi2 SNF 2009-02-23 06:27:27: Chiller Message-ID: The DCS chiller was at 36 degrees and should be at 18. This could be why it was fluctuating. Turned off chiller to let the temp come down and then will restart it. From maurice at snf.stanford.edu Tue Feb 24 13:59:46 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 24 Feb 2009 13:59:46 -0800 Subject: Comment epi2 SNF 2009-02-24 13:59:45: inspected doom Message-ID: clean From skoh at snf.stanford.edu Tue Feb 24 18:51:50 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Tue, 24 Feb 2009 18:51:50 -0800 Subject: Problem epi2 SNF 2009-02-24 18:51:50: particles on edges of wafers Message-ID: I noticed surface particles on the edges of the wafers. The particles could have been picked up from the cassette. Will it be possible to clean the cassettes? From jrjain at snf.stanford.edu Tue Feb 24 23:42:41 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Tue, 24 Feb 2009 23:42:41 -0800 Subject: Problem epi2 SNF 2009-02-24 23:42:40: Many large particles... Message-ID: ..for MHAH Ge epitaxy with both 3 layers and 5 layers. There are large particles across all four wafers that were processed. From maurice at snf.stanford.edu Wed Feb 25 13:58:14 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 25 Feb 2009 13:58:14 -0800 Subject: Comment epi2 SNF 2009-02-25 13:58:14: Cleaned cassette in LLA Message-ID: From maurice at snf.stanford.edu Wed Feb 25 15:11:14 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 25 Feb 2009 15:11:14 -0800 Subject: Comment epi2 SNF 2009-02-25 15:11:13: LLB cassette cleaned Message-ID: From slcheng at snf.stanford.edu Wed Feb 25 20:54:52 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Wed, 25 Feb 2009 20:54:52 -0800 Subject: Shutdown epi2 SNF 2009-02-25 20:54:51: DCS overshoot Message-ID: i set 60 sccm and it gives me 200 to 1000. By checking the Gas panel, the MFC of DCS is always on (green). I think DCS is leaking. i also check the DCS box inside the room and found out that the valve is closed. I don't think this is related to the overshoot. but is it normal? From eenriquez at snf.stanford.edu Thu Feb 26 09:25:36 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Feb 2009 09:25:36 -0800 Subject: Shutdown epi2 SNF 2009-02-25 20:54:51: DCS overshoot Message-ID: Pumped down the gas line. Now working on the chiller. Taking the system off Shutdown so user can run germanium. From eenriquez at snf.stanford.edu Thu Feb 26 09:26:39 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Feb 2009 09:26:39 -0800 Subject: Comment epi2 SNF 2009-02-26 09:26:38: Down for DCS Message-ID: Down for processes requiring DCS From eenriquez at snf.stanford.edu Thu Feb 26 13:31:23 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Feb 2009 13:31:23 -0800 Subject: Comment epi2 SNF 2009-02-26 09:26:38: Down for DCS Message-ID: Reseated the chiller controller. Water temperature now is 24 C (23 C actual). Flowed DCS for 5 minutes. Flow was very stable From eenriquez at snf.stanford.edu Fri Feb 27 08:14:20 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Feb 2009 08:14:20 -0800 Subject: Problem epi2 SNF 2009-02-21 14:33:55: DCS jumping wildly Message-ID: DCS flow stable after the gas cylinder chiller repair. From eenriquez at snf.stanford.edu Fri Feb 27 08:14:35 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Feb 2009 08:14:35 -0800 Subject: Problem epi2 SNF 2009-02-21 22:44:55: DCS still sporadic Message-ID: DCS flow stable after the gas cylinder chiller repair. From eenriquez at snf.stanford.edu Fri Feb 27 08:14:45 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 Feb 2009 08:14:45 -0800 Subject: Comment epi2 SNF 2009-02-23 06:27:27: Chiller Message-ID: DCS flow stable after the gas cylinder chiller repair. From narii at snf.stanford.edu Sat Feb 28 20:29:41 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 28 Feb 2009 20:29:41 -0800 Subject: Problem epi2 SNF 2009-02-28 20:29:41: Heater contact error Message-ID: Heater contact error ocurred while setting the chamber to hot idle from cold idle. From narii at snf.stanford.edu Sat Feb 28 20:30:38 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 28 Feb 2009 20:30:38 -0800 Subject: Problem epi2 SNF 2009-02-28 20:30:38: Heater contact error Message-ID: Heater contact error occured while setting the chamber to hot idle from cold idle From grahamab at snf.stanford.edu Sat Feb 28 21:55:40 2009 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sat, 28 Feb 2009 21:55:40 -0800 Subject: Comment epi2 SNF 2009-02-28 21:55:40: reset chamber, seems okay Message-ID: reset the chamber, went from inert idle -> cold idle -> hot idle -> active idle with no trouble.