Shutdown epi2 SNF 2009-02-04 18:15:16: Heater Contactor off+ water flow low

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Feb 4 19:06:30 PST 2009


Re-seated all the cooling water line quick disconnect fittings. Switched chamber status from Cold Idle to Hot Idle many times without any problems.
If problem re-occurs,  DO NOT SHUTDOWN the tool immediately.  Try several times to reset  the fault and then Go to HOT IDLE 




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