Shutdown epi2 SNF 2009-02-11 16:40:52: Susceptor tilted

skoh at snf.stanford.edu skoh at snf.stanford.edu
Wed Feb 11 16:40:53 PST 2009


Maurice checked the chamber when I noticed that the upper temperatures of the wafer during the recipe was inconsistent and higher than before.  We found that the susceptor was tilted, probably explaining the temperature issues.




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