Shutdown epi2 SNF 2009-02-12 15:04:14: Testing for haze
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu Feb 12 15:04:15 PST 2009
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Shutdown epi2 SNF 2009-02-11 16:40:52: Susceptor tilted
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Shutdown epi2 SNF 2009-02-12 15:04:14: Testing for haze
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Testing for haze after susceptor support pin replaced.
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Shutdown epi2 SNF 2009-02-12 15:04:14: Testing for haze
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