Shutdown epi2 SNF 2009-02-17 16:47:48: wafer out of pocket

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Feb 18 17:03:25 PST 2009


Susceptor is moving too fast from home to process position...wafer is not brought into susceptor pocket gently.
Inspecting susceptor lift acuator.




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