Comment epi2 SNF 2009-02-18 10:37:21: update

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Feb 18 17:06:04 PST 2009


EE adjusted air pressure to the susceptor lift cylinders to adjust the lift/drop speed for the home/process/exchange positions.
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Tested wafer drop...it is in the middle of the pocket




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