Problem epi2 SNF 2009-02-24 18:51:50: particles on edges of wafers

skoh at snf.stanford.edu skoh at snf.stanford.edu
Tue Feb 24 18:51:50 PST 2009


I noticed surface particles on the edges of the wafers.  The particles could have been picked up from the cassette.  Will it be possible to clean the cassettes?  




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