Problem epi2 SNF 2009-02-24 23:42:40: Many large particles...

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Tue Feb 24 23:42:41 PST 2009


..for MHAH Ge epitaxy with both 3 layers and 5 layers.  There are large particles across all four wafers that were processed.




More information about the epi2-pcs mailing list