Problem epi2 SNF 2009-02-24 23:42:40: Many large particles...

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Tue Feb 24 23:42:41 PST 2009

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..for MHAH Ge epitaxy with both 3 layers and 5 layers.  There are large particles across all four wafers that were processed.

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