Shutdown epi2 SNF 2009-02-25 20:54:51: DCS overshoot

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Wed Feb 25 20:54:52 PST 2009


i set 60 sccm and it gives me 200 to 1000.
By checking the Gas panel, the MFC of DCS is always on (green). I think  DCS is leaking.
i also check the DCS box inside the room and found out that the valve is closed. I don't think this is related to the overshoot. but is it normal?




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