February 2009 Archives by thread

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Starting: Mon Feb 2 11:25:11 PST 2009
Ending: Sat Feb 28 21:55:40 PST 2009
Messages: 40

• Shutdown epi2 SNF 2009-01-31 21:06:35: wafer slide detected   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-01-31 20:53:31: wafer slide detected   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-01-24 18:47:25: mechanical arm problem   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-01-22 19:16:54: Possible wafer handling problem   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-01-29 10:10:47: Dome inspected/clear   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-02-04 09:21:03: Chamber A Main Scrubber fault   rshyam at snf.stanford.edu
  • Problem epi2 SNF 2009-02-04 09:21:03: Chamber A Main Scrubber fault   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-02-04 18:15:16: Heater Contactor off+ water flow low   slcheng at snf.stanford.edu
  • Shutdown epi2 SNF 2009-02-04 18:15:16: Heater Contactor off+ water flow low   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-02-11 16:40:52: Susceptor tilted   skoh at snf.stanford.edu
  • Shutdown epi2 SNF 2009-02-11 16:40:52: Susceptor tilted   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-02-12 15:04:14: Testing for haze   maurice at snf.stanford.edu
  • Shutdown epi2 SNF 2009-02-12 15:04:14: Testing for haze   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-02-12 17:13:26: Need test for Ge   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-02-13 00:24:12: Ge tests   rshyam at snf.stanford.edu
  • Comment epi2 SNF 2009-02-13 00:24:12: Ge tests   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-02-17 16:47:48: wafer out of pocket   maurice at snf.stanford.edu
  • Shutdown epi2 SNF 2009-02-17 16:47:48: wafer out of pocket   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-02-18 10:37:21: update   maurice at snf.stanford.edu
  • Comment epi2 SNF 2009-02-18 10:37:21: update   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-02-18 17:07:58: Ge testing   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-02-20 07:41:24: system left in active idle again   grahamab at snf.stanford.edu
• Problem epi2 SNF 2009-02-21 14:33:55: DCS jumping wildly   rshyam at snf.stanford.edu
  • Problem epi2 SNF 2009-02-21 14:33:55: DCS jumping wildly   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2009-02-21 22:44:55: DCS still sporadic   grahamab at snf.stanford.edu
  • Problem epi2 SNF 2009-02-21 22:44:55: DCS still sporadic   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-02-23 06:27:27: Chiller   mdickey at snf.stanford.edu
  • Comment epi2 SNF 2009-02-23 06:27:27: Chiller   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-02-24 13:59:45: inspected doom   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-02-24 18:51:50: particles on edges of wafers   skoh at snf.stanford.edu
• Problem epi2 SNF 2009-02-24 23:42:40: Many large particles...   jrjain at snf.stanford.edu
• Comment epi2 SNF 2009-02-25 13:58:14: Cleaned cassette in LLA   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-02-25 15:11:13: LLB cassette cleaned   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-02-25 20:54:51: DCS overshoot   slcheng at snf.stanford.edu
  • Shutdown epi2 SNF 2009-02-25 20:54:51: DCS overshoot   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-02-26 09:26:38: Down for DCS   eenriquez at snf.stanford.edu
  • Comment epi2 SNF 2009-02-26 09:26:38: Down for DCS   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2009-02-28 20:29:41: Heater contact error   narii at snf.stanford.edu
• Problem epi2 SNF 2009-02-28 20:30:38: Heater contact error   narii at snf.stanford.edu
• Comment epi2 SNF 2009-02-28 21:55:40: reset chamber, seems okay   grahamab at snf.stanford.edu

Last message date: Sat Feb 28 21:55:40 PST 2009
Archived on: Sun Dec 23 08:52:51 PST 2012

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