From mdickey at snf.stanford.edu Tue Jan 6 12:14:15 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 6 Jan 2009 12:14:15 -0800 Subject: Shutdown epi2 SNF 2009-01-06 12:14:15: Scrubber down Message-ID: The water pump for the scrubber failed. Sending out pump for rebuild From maurice at snf.stanford.edu Wed Jan 7 15:22:26 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 7 Jan 2009 15:22:26 -0800 Subject: Shutdown epi2 SNF 2009-01-06 12:14:15: Scrubber down Message-ID: Pump rebuilt. Etched chamber. Ran DCS test run. Looks good. From masaharu at snf.stanford.edu Thu Jan 8 19:38:07 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Thu, 8 Jan 2009 19:38:07 -0800 Subject: Problem epi2 SNF 2009-01-08 19:38:06: error: couldn't complete wafer transfer Message-ID: I saw the error: Chamber A couldn't complete wafer transfer. On the panel, the wafer was sitting on the chamber A, but I found that the wafer was actually on the blade and I could return the wafer back to LLA. I tried running 3times but there was no success. I also tried robot arm homing, but no success again. I do not shut the system down, however, there is obviously some problem on wafer transfer. Need inspection. From eenriquez at snf.stanford.edu Fri Jan 9 09:07:50 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Jan 2009 09:07:50 -0800 Subject: Shutdown epi2 SNF 2009-01-09 09:07:50: Chamber not picking up wafer Message-ID: From maurice at snf.stanford.edu Fri Jan 9 17:52:28 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 Jan 2009 17:52:28 -0800 Subject: Problem epi2 SNF 2009-01-09 17:52:27: No blower air Message-ID: From eenriquez at snf.stanford.edu Tue Jan 13 10:30:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Jan 2009 10:30:16 -0800 Subject: Problem epi2 SNF 2009-01-09 17:52:27: No blower air Message-ID: Adjusted the clamps for the bottom heater lamp cover. From eenriquez at snf.stanford.edu Tue Jan 13 10:34:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Jan 2009 10:34:30 -0800 Subject: Shutdown epi2 SNF 2009-01-09 09:07:50: Chamber not picking up wafer Message-ID: Replaced the susceptor support, wafer lift pins and susceptor support pins. Also cleaned exhaust port and the atmoshpheric exhaust valve. Ran the Big Etch recipe with no problems. From eenriquez at snf.stanford.edu Tue Jan 13 10:35:21 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Jan 2009 10:35:21 -0800 Subject: Problem epi2 SNF 2009-01-08 19:38:06: error: couldn't complete wafer transfer Message-ID: Replaced the susceptor support, wafer lift pins and susceptor support pins. Also cleaned exhaust port and the atmoshpheric exhaust valve. Ran the Big Etch recipe with no problems. From eenriquez at snf.stanford.edu Tue Jan 13 10:35:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Jan 2009 10:35:34 -0800 Subject: Comment epi2 SNF 2008-12-06 09:31:33: LLA cassette found sitting outside Message-ID: Archived From maurice at snf.stanford.edu Tue Jan 13 15:04:24 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 13 Jan 2009 15:04:24 -0800 Subject: Shutdown epi2 SNF 2009-01-13 15:04:23: testing for haze after system opened Message-ID: From maurice at snf.stanford.edu Wed Jan 14 10:12:48 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 14 Jan 2009 10:12:48 -0800 Subject: Shutdown epi2 SNF 2009-01-13 15:04:23: testing for haze after system opened Message-ID: Haze cleared From maurice at snf.stanford.edu Wed Jan 14 14:05:00 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 14 Jan 2009 14:05:00 -0800 Subject: Shutdown epi2 SNF 2009-01-14 14:04:59: User reports haze on Ge dep Message-ID: From maurice at snf.stanford.edu Thu Jan 15 16:19:47 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 15 Jan 2009 16:19:47 -0800 Subject: Shutdown epi2 SNF 2009-01-15 16:19:47: Susceptor lift Pin broke Message-ID: While centering the wafer drop position on the susceptor, a susceptor lift pin broke. Strange. From eenriquez at snf.stanford.edu Fri Jan 16 14:28:43 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Jan 2009 14:28:43 -0800 Subject: Comment epi2 SNF 2009-01-16 14:28:43: Update Message-ID: Unable to remove the dome. Seems to be stuck on the o-ring seal. Will try again on Tues. From maurice at snf.stanford.edu Tue Jan 20 11:42:07 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 20 Jan 2009 11:42:07 -0800 Subject: Comment epi2 SNF 2009-01-16 14:28:43: Update Message-ID: dome removed pin replaced From maurice at snf.stanford.edu Tue Jan 20 11:42:22 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 20 Jan 2009 11:42:22 -0800 Subject: Shutdown epi2 SNF 2009-01-15 16:19:47: Susceptor lift Pin broke Message-ID: pin replaced From maurice at snf.stanford.edu Tue Jan 20 11:43:34 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 20 Jan 2009 11:43:34 -0800 Subject: Shutdown epi2 SNF 2009-01-14 14:04:59: User reports haze on Ge dep Message-ID: wafer position centered in susceptor pocket From maurice at snf.stanford.edu Tue Jan 20 11:44:25 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 20 Jan 2009 11:44:25 -0800 Subject: Shutdown epi2 SNF 2009-01-20 11:44:25: Testing after pin replaced Message-ID: Running a couple of etches and then testing for haze From eenriquez at snf.stanford.edu Tue Jan 20 11:45:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Jan 2009 11:45:30 -0800 Subject: Comment epi2 SNF 2009-01-16 14:28:43: Update Message-ID: Unable to remove the quartz dome because the slit door between the process chamber and the transfer chamber had a leak. Cleaned the door o-ring and also the transfer plate. Replaced the broken lift pin and adjusted the wafer handoff postion. Ran the BigEtch recipe with no problems. From eenriquez at snf.stanford.edu Tue Jan 20 11:45:36 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Jan 2009 11:45:36 -0800 Subject: Shutdown epi2 SNF 2009-01-20 11:44:25: Testing after pin replaced Message-ID: Unable to remove the quartz dome because the slit door between the process chamber and the transfer chamber had a leak. Cleaned the door o-ring and also the transfer plate. Replaced the broken lift pin and adjusted the wafer handoff postion. Ran the BigEtch recipe with no problems. From eenriquez at snf.stanford.edu Tue Jan 20 11:46:00 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Jan 2009 11:46:00 -0800 Subject: Problem epi2 SNF 2008-12-03 16:41:13: Phosphine at order level Message-ID: Archived From maurice at snf.stanford.edu Tue Jan 20 16:57:14 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 20 Jan 2009 16:57:14 -0800 Subject: Comment epi2 SNF 2008-11-04 10:58:00: dome clear Message-ID: archive From maurice at snf.stanford.edu Tue Jan 20 16:58:47 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 20 Jan 2009 16:58:47 -0800 Subject: Comment epi2 SNF 2009-01-20 16:58:46: Si test haze free Message-ID: Now running a Ge test SLGe-DOP2 From maurice at snf.stanford.edu Tue Jan 20 17:36:43 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 20 Jan 2009 17:36:43 -0800 Subject: Shutdown epi2 SNF 2009-01-20 17:36:43: Ge wafer shows cresent moon shaped deposition Message-ID: Looks like wafer is not ni pocket during deposition From maurice at snf.stanford.edu Wed Jan 21 10:40:36 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 21 Jan 2009 10:40:36 -0800 Subject: Shutdown epi2 SNF 2009-01-20 17:36:43: Ge wafer shows cresent moon shaped deposition Message-ID: Wafers are centered if chamber B is used. Use chamber B when loadiing wafers. Don't use chamber A to run wafers From maurice at snf.stanford.edu Thu Jan 22 14:34:39 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 22 Jan 2009 14:34:39 -0800 Subject: Comment epi2 SNF 2009-01-20 16:58:46: Si test haze free Message-ID: Ge test good...used SLGE-DOP2 program From skoh at snf.stanford.edu Thu Jan 22 19:16:55 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Thu, 22 Jan 2009 19:16:55 -0800 Subject: Problem epi2 SNF 2009-01-22 19:16:54: Possible wafer handling problem Message-ID: I ran 4 wafers in automatic mode (slots 2 to 5). When I unloaded the wafers, I noticed that the wafer in slot 3 was askew. It was slightly rotated compared to the other wafers. From slcheng at snf.stanford.edu Sat Jan 24 18:47:26 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Sat, 24 Jan 2009 18:47:26 -0800 Subject: Comment epi2 SNF 2009-01-24 18:47:25: mechanical arm problem Message-ID: i found that sometimes the wafer was not load properly back to the cassette in load lock B. it was sometimes a inch away or the edge was not sitting in the right direction. I guess the position of the arm is off a little bit. i ran 8 runs so far and found this happend 3 times. From masaharu at snf.stanford.edu Wed Jan 28 06:19:42 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Wed, 28 Jan 2009 06:19:42 -0800 Subject: Comment epi2 SNF 2009-01-28 06:19:42: Do not forget to return to inert idle Message-ID: I recently saw a couple of times that nobody used and the system was in active idle all night. Please make sure to return to inert idle to maintain the lifetime. From maurice at snf.stanford.edu Thu Jan 29 10:10:47 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 29 Jan 2009 10:10:47 -0800 Subject: Comment epi2 SNF 2009-01-29 10:10:47: Dome inspected/clear Message-ID: dome clear From ryw at snf.stanford.edu Sat Jan 31 20:53:31 2009 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Sat, 31 Jan 2009 20:53:31 -0800 Subject: Problem epi2 SNF 2009-01-31 20:53:31: wafer slide detected Message-ID: cannot close the loadlock B, even though I have flattened all the wafers, kind of unexpected. Did not shutdown, if any Sunday users can fix it, then you can use it, sorry for the inconvinence. From ryw at snf.stanford.edu Sat Jan 31 21:06:35 2009 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Sat, 31 Jan 2009 21:06:35 -0800 Subject: Shutdown epi2 SNF 2009-01-31 21:06:35: wafer slide detected Message-ID: Even aligned the wafer, still have the problem