Problem epi2 SNF 2009-01-08 19:38:06: error: couldn't complete wafer transfer

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Thu Jan 8 19:38:07 PST 2009


I saw the error: Chamber A couldn't complete wafer transfer.
On the panel, the wafer was sitting on the chamber A,
but I found that the wafer was actually on the blade
and I could return the wafer back to LLA.
I tried running 3times but there was no success.
I also tried robot arm homing, but no success again.
I do not shut the system down, however,
there is obviously some problem on wafer transfer.
Need inspection.




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