Shutdown epi2 SNF 2009-01-09 09:07:50: Chamber not picking up wafer
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Jan 9 09:07:50 PST 2009
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Problem epi2 SNF 2009-01-08 19:38:06: error: couldn't complete wafer transfer
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Shutdown epi2 SNF 2009-01-09 09:07:50: Chamber not picking up wafer
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Shutdown epi2 SNF 2009-01-09 09:07:50: Chamber not picking up wafer
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