Problem epi2 SNF 2009-01-09 17:52:27: No blower air
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri Jan 9 17:52:28 PST 2009
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Shutdown epi2 SNF 2009-01-09 09:07:50: Chamber not picking up wafer
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Problem epi2 SNF 2009-01-09 17:52:27: No blower air
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Shutdown epi2 SNF 2009-01-09 09:07:50: Chamber not picking up wafer
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Problem epi2 SNF 2009-01-09 17:52:27: No blower air
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