Shutdown epi2 SNF 2009-01-09 09:07:50: Chamber not picking up wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Jan 13 10:34:30 PST 2009


Replaced the susceptor support, wafer lift pins and susceptor support pins.  Also cleaned exhaust port and the atmoshpheric exhaust valve.  Ran the Big Etch recipe with no problems.




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