Problem epi2 SNF 2009-01-08 19:38:06: error: couldn't complete wafer transfer

eenriquez at eenriquez at
Tue Jan 13 10:35:21 PST 2009

Replaced the susceptor support, wafer lift pins and susceptor support pins.  Also cleaned exhaust port and the atmoshpheric exhaust valve.  Ran the Big Etch recipe with no problems.

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