Shutdown epi2 SNF 2009-01-15 16:19:47: Susceptor lift Pin broke

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Jan 15 16:19:47 PST 2009


While centering the wafer drop position on the susceptor, a susceptor lift pin broke.
Strange.




More information about the epi2-pcs mailing list