Shutdown epi2 SNF 2009-01-15 16:19:47: Susceptor lift Pin broke
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Tue Jan 20 11:42:22 PST 2009
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Shutdown epi2 SNF 2009-01-15 16:19:47: Susceptor lift Pin broke
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Comment epi2 SNF 2009-01-16 14:28:43: Update
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pin replaced
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Shutdown epi2 SNF 2009-01-15 16:19:47: Susceptor lift Pin broke
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Comment epi2 SNF 2009-01-16 14:28:43: Update
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