Shutdown epi2 SNF 2009-01-14 14:04:59: User reports haze on Ge dep
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Tue Jan 20 11:43:34 PST 2009
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Shutdown epi2 SNF 2009-01-14 14:04:59: User reports haze on Ge dep
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Shutdown epi2 SNF 2009-01-15 16:19:47: Susceptor lift Pin broke
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wafer position centered in susceptor pocket
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Shutdown epi2 SNF 2009-01-14 14:04:59: User reports haze on Ge dep
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Shutdown epi2 SNF 2009-01-15 16:19:47: Susceptor lift Pin broke
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