Comment epi2 SNF 2009-01-16 14:28:43: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Jan 20 11:45:30 PST 2009


Unable to remove the quartz dome because the slit door between the process chamber and the transfer chamber had a leak.  
Cleaned the door o-ring and also the transfer plate.  Replaced the broken lift pin and adjusted the wafer handoff postion.
Ran the BigEtch recipe with no problems.




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