Shutdown epi2 SNF 2009-01-20 17:36:43: Ge wafer shows cresent moon shaped deposition

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Jan 21 10:40:36 PST 2009


Wafers are centered if chamber B is used.
Use chamber B when loadiing wafers.
Don't use chamber A to run wafers




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