Comment epi2 SNF 2009-01-20 16:58:46: Si test haze free
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu Jan 22 14:34:39 PST 2009
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Comment epi2 SNF 2009-01-20 16:58:46: Si test haze free
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Shutdown epi2 SNF 2009-01-20 17:36:43: Ge wafer shows cresent moon shaped deposition
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Ge test good...used SLGE-DOP2 program
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Comment epi2 SNF 2009-01-20 16:58:46: Si test haze free
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Shutdown epi2 SNF 2009-01-20 17:36:43: Ge wafer shows cresent moon shaped deposition
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