Problem epi2 SNF 2009-01-22 19:16:54: Possible wafer handling problem

skoh at snf.stanford.edu skoh at snf.stanford.edu
Thu Jan 22 19:16:55 PST 2009


I ran 4 wafers in automatic mode (slots 2 to 5).  When I unloaded the wafers, I noticed that the wafer in slot 3 was askew.  It was slightly rotated compared to the other wafers.




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