Comment epi2 SNF 2009-01-24 18:47:25: mechanical arm problem

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Sat Jan 24 18:47:26 PST 2009


i found that sometimes the wafer was not load properly back   to the cassette in load lock B. it was sometimes  a inch away or the edge was not sitting in the right direction. I guess the position of the arm is off a little bit. i ran 8 runs so far and found this happend 3 times.




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