Problem epi2 SNF 2009-01-31 20:53:31: wafer slide detected

ryw at ryw at
Sat Jan 31 20:53:31 PST 2009

cannot close the loadlock B, even though I have flattened all the wafers, kind of unexpected. Did not shutdown, if any Sunday users can fix it, then you can use it, sorry for the inconvinence.

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