Problem epi2 SNF 2009-01-31 20:53:31: wafer slide detected

ryw at snf.stanford.edu ryw at snf.stanford.edu
Sat Jan 31 20:53:31 PST 2009


cannot close the loadlock B, even though I have flattened all the wafers, kind of unexpected. Did not shutdown, if any Sunday users can fix it, then you can use it, sorry for the inconvinence.




More information about the epi2-pcs mailing list