Shutdown epi2 SNF 2009-01-31 21:06:35: wafer slide detected
ryw at snf.stanford.edu
ryw at snf.stanford.edu
Sat Jan 31 21:06:35 PST 2009
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Problem epi2 SNF 2009-01-31 20:53:31: wafer slide detected
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Even aligned the wafer, still have the problem
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Problem epi2 SNF 2009-01-31 20:53:31: wafer slide detected
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