January 2009 Archives by thread

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Starting: Tue Jan 6 12:14:15 PST 2009
Ending: Sat Jan 31 21:06:35 PST 2009
Messages: 32

• Shutdown epi2 SNF 2009-01-06 12:14:15: Scrubber down   mdickey at snf.stanford.edu
  • Shutdown epi2 SNF 2009-01-06 12:14:15: Scrubber down   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-01-08 19:38:06: error: couldn't complete wafer transfer   masaharu at snf.stanford.edu
  • Problem epi2 SNF 2009-01-08 19:38:06: error: couldn't complete wafer transfer   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-01-09 09:07:50: Chamber not picking up wafer   eenriquez at snf.stanford.edu
  • Shutdown epi2 SNF 2009-01-09 09:07:50: Chamber not picking up wafer   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2009-01-09 17:52:27: No blower air   maurice at snf.stanford.edu
  • Problem epi2 SNF 2009-01-09 17:52:27: No blower air   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-12-06 09:31:33: LLA cassette found sitting outside   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-01-13 15:04:23: testing for haze after system opened   maurice at snf.stanford.edu
  • Shutdown epi2 SNF 2009-01-13 15:04:23: testing for haze after system opened   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-01-14 14:04:59: User reports haze on Ge dep   maurice at snf.stanford.edu
  • Shutdown epi2 SNF 2009-01-14 14:04:59: User reports haze on Ge dep   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-01-15 16:19:47: Susceptor lift Pin broke   maurice at snf.stanford.edu
  • Shutdown epi2 SNF 2009-01-15 16:19:47: Susceptor lift Pin broke   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-01-16 14:28:43: Update   eenriquez at snf.stanford.edu
  • Comment epi2 SNF 2009-01-16 14:28:43: Update   maurice at snf.stanford.edu
  • Comment epi2 SNF 2009-01-16 14:28:43: Update   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-01-20 11:44:25: Testing after pin replaced   maurice at snf.stanford.edu
  • Shutdown epi2 SNF 2009-01-20 11:44:25: Testing after pin replaced   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2008-12-03 16:41:13: Phosphine at order level   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2008-11-04 10:58:00: dome clear   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-01-20 16:58:46: Si test haze free   maurice at snf.stanford.edu
  • Comment epi2 SNF 2009-01-20 16:58:46: Si test haze free   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-01-20 17:36:43: Ge wafer shows cresent moon shaped deposition   maurice at snf.stanford.edu
  • Shutdown epi2 SNF 2009-01-20 17:36:43: Ge wafer shows cresent moon shaped deposition   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-01-22 19:16:54: Possible wafer handling problem   skoh at snf.stanford.edu
• Comment epi2 SNF 2009-01-24 18:47:25: mechanical arm problem   slcheng at snf.stanford.edu
• Comment epi2 SNF 2009-01-28 06:19:42: Do not forget to return to inert idle   masaharu at snf.stanford.edu
• Comment epi2 SNF 2009-01-29 10:10:47: Dome inspected/clear   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-01-31 20:53:31: wafer slide detected   ryw at snf.stanford.edu
• Shutdown epi2 SNF 2009-01-31 21:06:35: wafer slide detected   ryw at snf.stanford.edu

Last message date: Sat Jan 31 21:06:35 PST 2009
Archived on: Sun Dec 23 08:52:51 PST 2012

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