Comment epi2 SNF 2009-07-09 10:54:47: 20 KW temp test

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Jul 9 10:54:48 PDT 2009


Ran AAA_20KW_ TEST
Read upper and lower temps at 230 sec into step 2
4/22/09 upper=885   lower=885
 (Right after AMAT did temp qual on clean system)
-
7/09/09 upper=879   lower=885  
(AAA_mega etch done before  test. 
Users may want to increase there deposition temperatures slightly if their recipes are temerature sensitive)




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