Problem epi2 SNF 2009-06-27 22:39:48: haze galore.
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu Jul 9 17:36:27 PDT 2009
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Shutdown epi2 SNF 2009-06-29 16:09:42: Testing for haze
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Comment epi2 SNF 2009-06-26 23:38:24: wafer inspection
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adjusted Ge etch/coat recipe
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Shutdown epi2 SNF 2009-06-29 16:09:42: Testing for haze
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Comment epi2 SNF 2009-06-26 23:38:24: wafer inspection
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