Comment epi2 SNF 2009-07-08 15:37:59: testing

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Jul 9 17:37:37 PDT 2009


We increased the coat time in the Ge etch/coat recipe then ran 7 wafers.  All were haze free in normal light.  We are still seeing the particles (defects??).  Szu-Lin looked at the wafers and thought the wafers look like what we were getting a few months ago (before the haze was an issue).
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