Problem epi2 SNF 2009-07-13 16:41:41: forgot to put the wafer at cool plate

cursive at cursive at
Mon Jul 13 16:41:42 PDT 2009

I was thinking and forgot to put my last one wafer on the cool plate.
The back side of my last wafer has something on it. 
I take out the cassette from Lot A and put it in a plaste bag.
Sorry about my mistake...

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