Problem epi2 SNF 2009-07-28 23:43:04: automatic mode problem

ryw at snf.stanford.edu ryw at snf.stanford.edu
Tue Jul 28 23:43:04 PDT 2009


when swtiching wafers, the error showing: "chamber A wafer transfer waiting for sequencer timeout, chamber A not ready to send the wafer."
Don't know why the system does that.




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