Problem epi2 SNF 2009-07-31 12:42:17: error message :chamber A detect system cabinet door being opened
cursive at snf.stanford.edu
cursive at snf.stanford.edu
Fri Jul 31 12:42:18 PDT 2009
Error message shows that chamber A detect system cabinet door being opened. Can't change to hot idle.
More information about the epi2-pcs
mailing list