From maurice at snf.stanford.edu Mon Jun 1 10:59:02 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 1 Jun 2009 10:59:02 -0700 Subject: Shutdown epi2 SNF 2009-06-01 10:59:02: no pressure control Message-ID: not even controling in cold idle From mdickey at snf.stanford.edu Tue Jun 2 11:17:25 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 2 Jun 2009 11:17:25 -0700 Subject: Shutdown epi2 SNF 2009-06-01 10:59:02: no pressure control Message-ID: readjusted throttle valve, Elmer ran a big etch From eenriquez at snf.stanford.edu Tue Jun 2 11:35:43 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Jun 2009 11:35:43 -0700 Subject: Problem epi2 SNF 2009-05-21 22:14:58: pressure errors; water flow errors Message-ID: Repaired the water flow switch to fix the water flow errors. Adjusted the throttle valve gears to fix the pressure errors. From eenriquez at snf.stanford.edu Thu Jun 4 13:01:23 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Jun 2009 13:01:23 -0700 Subject: Comment epi2 SNF 2009-06-04 13:01:22: Scrubber work Message-ID: Exhaust scrubber was alarming for low sump level. Increased incoming water flow from 2 to 4 GPM From till at snf.stanford.edu Thu Jun 4 16:13:54 2009 From: till at snf.stanford.edu (till at snf.stanford.edu) Date: Thu, 4 Jun 2009 16:13:54 -0700 Subject: Problem epi2 SNF 2009-06-04 16:13:53: pressure deviation fault during clean process Message-ID: Error appears now during every clean process. Happens before the coat and cant get over it. Therefore, backside looks kind of dirty. From maurice at snf.stanford.edu Fri Jun 5 15:14:07 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 5 Jun 2009 15:14:07 -0700 Subject: Comment epi2 SNF 2009-06-05 15:14:06: Dome inspected Message-ID: clean From slcheng at snf.stanford.edu Sun Jun 7 17:50:54 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Sun, 7 Jun 2009 17:50:54 -0700 Subject: Problem epi2 SNF 2009-06-07 17:50:53: Problems for Auto run and lift of Chamber A Message-ID: When i started the Ge Etch Coat, it shows a fault message " Chamber A lift cannot reach process position". and went to cold idle. The mahcine keep showing the fault message under cold idle. I need to bring it back down to Inert idle and bring it back up again to solve the problem. It works right now. However, still suggest to check the dome about this lift problem. Another problem is the Auto run doesn't work right now. Need to run it in Manual mode. Probably need to home the machine. From maurice at snf.stanford.edu Mon Jun 8 11:14:48 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Jun 2009 11:14:48 -0700 Subject: Shutdown epi2 SNF 2009-06-08 11:14:47: inspecting lift action Message-ID: From jrjain at snf.stanford.edu Mon Jun 8 13:30:34 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Mon, 8 Jun 2009 13:30:34 -0700 Subject: Problem epi2 SNF 2009-06-08 13:30:33: Quartz Wand Message-ID: Needed to load some wafers at thermco2, but quartz wand was broken. Replaced it with epi2's, so new wand needed here. From maurice at snf.stanford.edu Mon Jun 8 14:16:05 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Jun 2009 14:16:05 -0700 Subject: Shutdown epi2 SNF 2009-06-08 11:14:47: inspecting lift action Message-ID: Unable to reproduce chamber lift problem. - Confirmed that wafer is dropping inside of susceptor pocket. - Dome and susceptor are clean. From maurice at snf.stanford.edu Mon Jun 8 14:20:38 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Jun 2009 14:20:38 -0700 Subject: Comment epi2 SNF 2009-06-05 15:14:06: Dome inspected Message-ID: archive From maurice at snf.stanford.edu Mon Jun 8 14:20:59 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Jun 2009 14:20:59 -0700 Subject: Comment epi2 SNF 2009-03-13 16:26:18: Amat visit Message-ID: logged From jrjain at snf.stanford.edu Mon Jun 8 21:45:35 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Mon, 8 Jun 2009 21:45:35 -0700 Subject: Problem epi2 SNF 2009-06-08 21:45:35: Pressure Setpoint Deviation Fault... Message-ID: ..during GE ETCH COAT. From tberg at snf.stanford.edu Tue Jun 9 08:10:53 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 9 Jun 2009 08:10:53 -0700 Subject: Problem epi2 SNF 2009-06-08 13:30:33: Quartz Wand Message-ID: Checked tip, it has a small chip but is functional From maurice at snf.stanford.edu Tue Jun 9 10:35:41 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 9 Jun 2009 10:35:41 -0700 Subject: Comment epi2 SNF 2009-06-09 10:35:41: system reset Message-ID: Chamber taken offline. System powered down/powered up Chamber and transfer chamber brought online both LL backfilled in From maurice at snf.stanford.edu Tue Jun 9 15:07:13 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 9 Jun 2009 15:07:13 -0700 Subject: Problem epi2 SNF 2009-06-07 17:50:53: Problems for Auto run and lift of Chamber A Message-ID: exercized the lift ~10 but could not reproduce lift error. Created a new sequence...system now runs in Auto From filip at snf.stanford.edu Thu Jun 11 14:11:47 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Thu, 11 Jun 2009 14:11:47 -0700 Subject: Shutdown epi2 SNF 2009-06-11 14:11:46: wafer slide error Message-ID: From maurice at snf.stanford.edu Thu Jun 11 14:15:23 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 11 Jun 2009 14:15:23 -0700 Subject: Shutdown epi2 SNF 2009-06-11 14:11:46: wafer slide error Message-ID: wafer recovered From gth at snf.stanford.edu Fri Jun 12 09:38:38 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Fri, 12 Jun 2009 09:38:38 -0700 Subject: Shutdown epi2 SNF 2009-06-12 09:38:37: Overpressure + heater contact off. Message-ID: CHA Overpressure detected by Hardware Interlock CHA heater contact off. From maurice at snf.stanford.edu Fri Jun 12 10:56:10 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Jun 2009 10:56:10 -0700 Subject: Shutdown epi2 SNF 2009-06-12 09:38:37: Overpressure + heater contact off. Message-ID: testing From rik at snf.stanford.edu Fri Jun 12 17:54:03 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Fri, 12 Jun 2009 17:54:03 -0700 Subject: Problem epi2 SNF 2009-06-12 17:54:02: Wafer shattered in LL B Message-ID: Please use LL A for now. Wafer shattered in LL B due to wafer slide error. From gth at snf.stanford.edu Sat Jun 13 23:21:32 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sat, 13 Jun 2009 23:21:32 -0700 Subject: Problem epi2 SNF 2009-06-13 23:21:31: ChA pressure setpoint deviation error Message-ID: Wafer was stuck in the Transfer chamber. recovered all wafers. system currently in isolated state. From gth at snf.stanford.edu Sat Jun 13 23:48:41 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sat, 13 Jun 2009 23:48:41 -0700 Subject: Problem epi2 SNF 2009-06-13 23:48:41: all wafers have a small haze Message-ID: all 4 inch wafers for 5 cycle thick epi-Ge, have a semicircular (Diameter 1cm) haze on the side of the second flat of the 4 inch wafer. this might give some indication of the poor positioning of the wafer stage in the epi chamber. particles are consistent. I guess no one is complaninig about that :) From jrjain at snf.stanford.edu Sun Jun 14 09:31:02 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sun, 14 Jun 2009 09:31:02 -0700 Subject: Problem epi2 SNF 2009-06-14 09:31:01: Pressure Setpoint Faults Message-ID: Chamber had pressure setpoints faults in GE ETCH COAT recipe. Brought system back from ISOLATED state both times. This problem has been occuring frequently and needs to be properly addressed now and finally. From maurice at snf.stanford.edu Mon Jun 15 09:56:03 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 15 Jun 2009 09:56:03 -0700 Subject: Comment epi2 SNF 2009-06-15 09:56:02: Throttle valve on order Message-ID: Throttle valve ordered a week and a half ago...no delivery date yet. - We will continue to experience pressure setpoint problems until it is replaced. - Pressure problem occurs during etch program when system is running hi pressure (needed to HCl clean the chamber). - Some user may choose to wait until the valve is repaired before running multiple wafers over night or stay around to reset system if there is a pressure fault. From mdickey at snf.stanford.edu Tue Jun 16 10:36:41 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 16 Jun 2009 10:36:41 -0700 Subject: Comment epi2 SNF 2009-06-16 10:36:41: Throttle valve Message-ID: Valve is expected on friday. Monday most likely for install. From filip at snf.stanford.edu Tue Jun 16 17:17:18 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Tue, 16 Jun 2009 17:17:18 -0700 Subject: Comment epi2 SNF 2009-06-16 17:17:18: Ge epi spot Message-ID: small hazy disk ~5mm on left edge of wafer. Same as gth reported. Otherwise no errors. From gth at snf.stanford.edu Wed Jun 17 09:34:02 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Wed, 17 Jun 2009 09:34:02 -0700 Subject: Shutdown epi2 SNF 2009-06-17 09:34:02: pressure set point deviation error. Message-ID: From gth at snf.stanford.edu Wed Jun 17 09:37:07 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Wed, 17 Jun 2009 09:37:07 -0700 Subject: Problem epi2 SNF 2009-06-17 09:37:06: LLA or LLB ? Message-ID: Please let the users know - which LL to use ? has the shattered wafer been cleaned up in LLB ? From gth at snf.stanford.edu Wed Jun 17 09:46:12 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Wed, 17 Jun 2009 09:46:12 -0700 Subject: Problem epi2 SNF 2009-06-17 09:46:12: hazy deps gone + particles stay Message-ID: hazy disc on the wafer edge (reported by gth and filip) are gone cornu spiral of particles exist ! From maurice at snf.stanford.edu Wed Jun 17 10:34:03 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 17 Jun 2009 10:34:03 -0700 Subject: Shutdown epi2 SNF 2009-06-17 09:34:02: pressure set point deviation error. Message-ID: problem is already on coral...see previous problem reports From maurice at snf.stanford.edu Wed Jun 17 10:34:39 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 17 Jun 2009 10:34:39 -0700 Subject: Comment epi2 SNF 2009-06-17 10:34:39: Inspected dome and susceptor Message-ID: clean...looks good From maurice at snf.stanford.edu Thu Jun 18 10:58:21 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 18 Jun 2009 10:58:21 -0700 Subject: Comment epi2 SNF 2009-06-16 10:36:41: Throttle valve Message-ID: Throttle valve installed! From maurice at snf.stanford.edu Thu Jun 18 11:06:30 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 18 Jun 2009 11:06:30 -0700 Subject: Comment epi2 SNF 2009-06-15 09:56:02: Throttle valve on order Message-ID: thottle valve replaced! From maurice at snf.stanford.edu Thu Jun 18 11:06:52 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 18 Jun 2009 11:06:52 -0700 Subject: Problem epi2 SNF 2009-06-14 09:31:01: Pressure Setpoint Faults Message-ID: thottle valve replaced! From maurice at snf.stanford.edu Thu Jun 18 11:07:04 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 18 Jun 2009 11:07:04 -0700 Subject: Problem epi2 SNF 2009-06-13 23:21:31: ChA pressure setpoint deviation error Message-ID: thottle valve replaced! From maurice at snf.stanford.edu Thu Jun 18 11:07:24 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 18 Jun 2009 11:07:24 -0700 Subject: Problem epi2 SNF 2009-06-08 21:45:35: Pressure Setpoint Deviation Fault... Message-ID: thottle valve replaced! From maurice at snf.stanford.edu Thu Jun 18 11:07:37 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 18 Jun 2009 11:07:37 -0700 Subject: Problem epi2 SNF 2009-06-04 16:13:53: pressure deviation fault during clean process Message-ID: thottle valve replaced! From maurice at snf.stanford.edu Thu Jun 18 11:07:54 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 18 Jun 2009 11:07:54 -0700 Subject: Comment epi2 SNF 2009-06-04 13:01:22: Scrubber work Message-ID: logged From maurice at snf.stanford.edu Thu Jun 18 11:08:09 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 18 Jun 2009 11:08:09 -0700 Subject: Comment epi2 SNF 2009-06-09 10:35:41: system reset Message-ID: logged From filip at snf.stanford.edu Thu Jun 18 12:11:16 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Thu, 18 Jun 2009 12:11:16 -0700 Subject: Comment epi2 SNF 2009-06-18 12:11:16: LLB casette Message-ID: taken for cleaning (Si dust on it). using LLA casette in LLB. From maurice at snf.stanford.edu Thu Jun 18 15:32:34 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 18 Jun 2009 15:32:34 -0700 Subject: Comment epi2 SNF 2009-06-18 12:11:16: LLB casette Message-ID: Cassette cleaned and put in LLA From maurice at snf.stanford.edu Thu Jun 18 15:33:04 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 18 Jun 2009 15:33:04 -0700 Subject: Problem epi2 SNF 2009-06-12 17:54:02: Wafer shattered in LL B Message-ID: Loadlock and cassette cleaned From maurice at snf.stanford.edu Thu Jun 18 15:33:32 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 18 Jun 2009 15:33:32 -0700 Subject: Problem epi2 SNF 2009-06-17 09:37:06: LLA or LLB ? Message-ID: both loadlocks are now usable From alsune at snf.stanford.edu Sat Jun 20 20:20:31 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sat, 20 Jun 2009 20:20:31 -0700 Subject: Problem epi2 SNF 2009-06-20 20:20:31: Particle on Wafers and Hazyness Message-ID: Found the receipe that was running perfectly two days ago was not working well, resulting in particles and haziness From ryw at snf.stanford.edu Fri Jun 26 16:12:15 2009 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Fri, 26 Jun 2009 16:12:15 -0700 Subject: Comment epi2 SNF 2009-06-26 16:12:14: wafer inspection Message-ID: run the same receipe for 8 wafers, first 4 are good, with minimum haze and particle, last 4 have a lot of haze and particle. Very possible that the Ge etch coat program is not long enough to clean the chamber during every run. From ryw at snf.stanford.edu Fri Jun 26 23:38:25 2009 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Fri, 26 Jun 2009 23:38:25 -0700 Subject: Comment epi2 SNF 2009-06-26 23:38:24: wafer inspection Message-ID: grow 1.2um SiGe, almost particle free, but more a little bit more haze than expected From gth at snf.stanford.edu Sat Jun 27 22:39:49 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sat, 27 Jun 2009 22:39:49 -0700 Subject: Problem epi2 SNF 2009-06-27 22:39:48: haze galore. Message-ID: perfect hazy wafers - on display. there is a lot of black rim on the circumference. System has to be checked. observed problems both for 4 times Ge etch coat runs in the beginning and 1 long AAA Mega etch. From maurice at snf.stanford.edu Mon Jun 29 11:02:10 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Jun 2009 11:02:10 -0700 Subject: Comment epi2 SNF 2009-06-29 11:02:09: leak checked Message-ID: 5 min pressure leakcheck p1 515.386 T p2 513.964 T rate -284.4mT/m - - 5 min RP leakcheck p1 0.075 T p2 0.11 T rate 7.0 mT/m From eenriquez at snf.stanford.edu Mon Jun 29 12:36:08 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 29 Jun 2009 12:36:08 -0700 Subject: Shutdown epi2 SNF 2009-06-29 12:36:07: Wafer not centered on susceptor Message-ID: From eenriquez at snf.stanford.edu Mon Jun 29 15:14:05 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 29 Jun 2009 15:14:05 -0700 Subject: Shutdown epi2 SNF 2009-06-29 12:36:07: Wafer not centered on susceptor Message-ID: Added 100 counts to the wafer extension into the chamber. Maurice is now checking the process. From maurice at snf.stanford.edu Mon Jun 29 16:09:42 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Jun 2009 16:09:42 -0700 Subject: Shutdown epi2 SNF 2009-06-29 16:09:42: Testing for haze Message-ID: Gth is running thick Ge tests after wafer drop adjustment From maurice at snf.stanford.edu Mon Jun 29 16:32:25 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Jun 2009 16:32:25 -0700 Subject: Problem epi2 SNF 2009-06-13 23:48:41: all wafers have a small haze Message-ID: Added 100 counts to the wafer extension into the chamber. Maurice is now checking the process. From maurice at snf.stanford.edu Mon Jun 29 16:33:01 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Jun 2009 16:33:01 -0700 Subject: Problem epi2 SNF 2009-05-15 16:40:55: particles on wafers + back of the wafers look bad. Message-ID: Added 100 counts to the wafer extension into the chamber. Maurice is now checking the process. From maurice at snf.stanford.edu Mon Jun 29 16:45:40 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Jun 2009 16:45:40 -0700 Subject: Comment epi2 SNF 2009-03-09 15:00:45: Updage Message-ID: archive