Problem epi2 SNF 2009-06-07 17:50:53: Problems for Auto run and lift of Chamber A

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Sun Jun 7 17:50:54 PDT 2009


When i started the Ge Etch Coat, it shows a fault message " Chamber A lift cannot reach process position". and went to cold idle. The mahcine keep showing the fault message under cold idle. I need to bring it back down to Inert idle and bring it back up again to solve the problem. It works right now. However, still suggest to check the dome about this lift problem. 
Another problem is the Auto run doesn't work right now. Need to run it in Manual mode. Probably need to home the machine.




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